To DFM or not to DFM?

  • Authors:
  • Wing Chiu Tam;Shawn Blanton

  • Affiliations:
  • Carnegie Mellon University, Pittsburgh, PA;Carnegie Mellon University, Pittsburgh, PA

  • Venue:
  • Proceedings of the 48th Design Automation Conference
  • Year:
  • 2011

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Abstract

Design for manufacturability (DFM) is inevitable because of the formidable challenges encountered in nano-scale integrated circuit (IC) manufacturing. Unfortunately, it is difficult for designers to understand the cost-benefit tradeoff when tuning their design through DFM to achieve better manufacturability. This work attempts to assist the designer in this aspect by providing a methodology (called RADAR --- Rule Assessment of Defect-Affected Regions) which uses failing-IC diagnosis results to systematically evaluate the effectiveness of DFM rules. RADAR is applied to the fail data from a 90nm Nvidia graphics processing unit (GPU) to demonstrate its viability. Specifically, evaluation of the via-enclosure rules revealed that they are much more needed in metal layers 3--6 than the remaining layers.