Hierarchical Mixed-Domain Circuit Simulation, Synthesis and Extraction Methodology for MEMS
Journal of VLSI Signal Processing Systems - Special issue on system level design
Simulating the Behavior of MEMS Devices: Computational Methods and Needs
IEEE Computational Science & Engineering
Microelectromechanical systems (MEMS) tutorial
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Formal engineering design synthesis
Agent-based control for object manipulation with modular self-reconfigurable robots
IJCAI'01 Proceedings of the 17th international joint conference on Artificial intelligence - Volume 2
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Miniature electromechanical sensors and actuators can be mass produced on silicon wafers much like ICs. They combine readily with signal-processing circuitry into powerful tools that measure, analyze, and control their environments. The authors describe the fabrication techniques, surface activity, atomic bonds, LIGA and SLIGA, and bury and destroy. The following applications are discussed: pressure sensors, medical equipment, industrial/consumer equipment, avionics, and mechanical applications