Simulating the Behavior of MEMS Devices: Computational Methods and Needs

Authors:
Stephen D. Senturia;Narayan Aluru;Jacob White
Affiliations:
-;-;-
Venue:
IEEE Computational Science & Engineering
Year:
1997

Citing 14
Cited 11

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Abstract

Arrays of MEMS devices can move and position tiny parts, such as integrated circuit chips, in flexible and predictable ways by oscillatory or ciliary action. The theory of programmable force fields can model this action, leading to algorithms for various types of micromanipulation that require no sensing of where the part is. Experiments support the theory.