Mathematica: a system for doing mathematics by computer (2nd ed.)
Mathematica: a system for doing mathematics by computer (2nd ed.)
Spice: A Guide to Circuit Simulation and Analysis Using PSpice
Spice: A Guide to Circuit Simulation and Analysis Using PSpice
Introduction to VLSI Systems
Simulating the Behavior of MEMS Devices: Computational Methods and Needs
IEEE Computational Science & Engineering
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The work described here deals with the problems of modeling and simulation for MEMS devices. The eventual goal is to produce a top-down MEMS design system similar to today‘s powerful VLSI design systems. In this work a fixed fabrication process (MUMPS) and a fixed layout tool (L-Edit) are chosen. Thus our efforts are concentrated on reliable simulation of designs and eventual comparison with actual fabricated parts. The cantilever beam is chosen as an example of how extraction from a physical layout may be modeled and interfaced with various simulators.