Simulating the Behavior of MEMS Devices: Computational Methods and Needs
IEEE Computational Science & Engineering
A fault simulation methodology for MEMS
DATE '00 Proceedings of the conference on Design, automation and test in Europe
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For MEMS devices modern technologies are used to integrate very complex components and subsystems closely together. Due to mixed-domain problems as well as the occurring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analyzed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.