Improving flow line scheduling by upstream mixed integer resource allocation in a wafer test facility

Authors:
Dirk Doleschal;Jan Lange;Gerald Weigert;Andreas Klemmt
Affiliations:
Technische Universität Dresden, Dresden, Germany;Technische Universität Dresden, Dresden, Germany;Technische Universität Dresden, Dresden, Germany;Infineon Technologies, Dresden, Germany
Venue:
Proceedings of the Winter Simulation Conference
Year:
2012

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Abstract

The effort for scheduling real manufacturing systems is generally very high for mathematical as well as for simulation-based methods. Combining both methods is the key for solving complex scheduling problems. The paper introduces a special approach, where at first a static resource allocation problem is solved by mixed integer programming (MIP). Based on the resulting reduced dedication matrices, feasible schedules are then generated by a discrete event simulation (DES). Possible applications can be found in many parts of the semiconductor manufacturing process, for example in the wafer test. The investigated wafer test consists of two pronounced bottlenecks; each of it is formed as a workcenter with its own dedication matrix. After testing the method with practice oriented benchmarks, the benefits of the approach are shown on data derived directly from the semiconductor manufacturing process.