Journal of Computational Physics
Experiences with backward simulation based approach for lot release planning
Proceedings of the 29th conference on Winter simulation
Effective implementation of cycle time reduction strategies for semiconductor back-end manufacturing
Proceedings of the 30th conference on Winter simulation
Interating simulation based scheduling with MES in a semi-conductor fab
Proceedings of the 30th conference on Winter simulation
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Simulation for recurring decisions
Proceedings of the 32nd conference on Winter simulation
Proceedings of the 34th conference on Winter simulation: exploring new frontiers
Proceedings of the 35th conference on Winter simulation: driving innovation
WSC '04 Proceedings of the 36th conference on Winter simulation
A simulation based optimization algorithm for slack reduction and workforce scheduling
Proceedings of the 40th Conference on Winter Simulation
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
Proceedings of the Winter Simulation Conference
Hi-index | 0.00 |
The semiconductor manufacturing process is usually divided in two parts: frontend and backend. In contrast to the frontend, where the manufacturing process is dominated by cluster-tools and cyclic routes, the backend has a predominant linear structure. In contrast to the frontend flow which is mostly controlled by dispatch rules, the backend process is suitable for real scheduling. A scheduling system for the backend of Infineon Technologies Dresden based on a Discrete Event Simulation (DES) system was developed and tested in the real industrial environment. The simulation model is automatically generated from the databases of the manufacturer. The system is used for short term scheduling - from one shift up to one week. The paper will focus on the aspect of optimizing the process flow and calculating exact release dates for lots. The basic principles are applicable not only in the semiconductor industry but also in other industrial sectors.