Automatic defect classification for semiconductor manufacturing

  • Authors:
  • Paul B. Chou;A. Ravishankar Rao;Martin C. Sturzenbecker;Frederick Y. Wu;Virginia H. Brecher

  • Affiliations:
  • -;-;-;-;-

  • Venue:
  • Machine Vision and Applications
  • Year:
  • 1997

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Abstract