Image Processing Techniques for Wafer Defect Cluster Identification

Authors:
Chenn-Jung Huang;Chua-Chin Wang;Chi-Feng Wu
Affiliations:
-;-;-
Venue:
IEEE Design & Test
Year:
2002

Citing 3
Cited 3

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Clustered defect detection of high quality chips using self-supervised multilayer perceptron

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ICNC'05 Proceedings of the First international conference on Advances in Natural Computation - Volume Part II

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Abstract

An automatic, wafer-scale, defect cluster identifier finds and marks all defective dies, further automating wafer testing. A prototype tool screens 45,000 wafers, saving a Philips Semiconductor test facility $100,000 in expenses per month.