High precision electron beam positioning using computer image analysis for electron beam testing

Authors:
John R. Michener
Affiliations:
-
Venue:
Microelectronic Engineering
Year:
1988

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Abstract

High precision electron beam positioning has been implemented in an electron beam tester using a relatively inaccurate mechanical positioner, the xy electron column field shift coils, and an image analysis computer to control the system. This system compares the observed circuit area with a reference circuit layout and determines positioning error values which it then corrects. Positioning precisions of +/-0.1 micrometers are easily achieved.