Identification of contact regions in semiconductor transistors by level-set methods

Authors:
Weifu Fang;Kazufumi Ito
Affiliations:
Department of Mathematics, West Virginia University, Morgantown, WV;Department of Mathematics, North Carolina State University, Raleigh, NC
Venue:
Journal of Computational and Applied Mathematics
Year:
2003

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Abstract

In this paper we present the formulation of level-set methods for the inverse problem of identifying an interface in the coefficient of an elliptic equation from a boundary measurement. This problem arises from the modeling of the identification of contact regions by boundary measurements for semiconductor transistors. We propose the Gauss-Newton direction as the interface velocity, and implement the scheme for a parameterized class of interfaces.