Exploiting self-similarity in geometry for voxel based solid modeling
SM '03 Proceedings of the eighth ACM symposium on Solid modeling and applications
Accurate Minkowski Sum Approximation of Polyhedral Models
PG '04 Proceedings of the Computer Graphics and Applications, 12th Pacific Conference
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Simulation of IC (Integrated Circuit) and MEMS (Micro Electro Mechanical Systems) fabrication processes offers many interesting challenges. A fabrication step, such as a deposition or an etch, can result in significant changes to the surface profile of the structure. A fabrication process can consist of tens of these steps; therefore, the geometric modeling algorithm must be robust and memory and computationally efficient. Moreover, it should be flexible enough to be able to account for the varied geometric changes that can occur during a step. We describe voxel-based geometric modeling techniques (which exhibit these properties) for accurately modeling different types of deposition and etch steps.