IBM Journal of Research and Development
A hybrid fuzzy adaptive sampling - Run rules for Shewhart control charts
Information Sciences: an International Journal
Recognition of semiconductor defect patterns using spatial filtering and spectral clustering
Expert Systems with Applications: An International Journal
Automated visual inspection expert system for multivariate statistical process control chart
Expert Systems with Applications: An International Journal
Information Sciences: an International Journal
Risk analysis models and risk degree determination in new product development: A case study
Journal of Engineering and Technology Management
Information Sciences: an International Journal
Beta control charts for monitoring fraction data
Expert Systems with Applications: An International Journal
Hi-index | 12.06 |
c-Chart was frequently used to monitor wafer defects during IC manufacturing. The clustering degree of defect on a wafer will increase along with the area of wafer gradually enlarging. The defect clustering causes the Poisson-based c-chart to exhibit many false alarms. Although several revised control charts have been developed to reduce the number of false alarms, those control charts still have some disadvantages in practical use. This study proposes a control chart that applies fuzzy theory and engineering experience to monitor wafer defects with the consideration of defect clustering. The proposed control chart is simpler and more rational than those revised c-charts. Finally, a case study of an IC company, owing to the HsinChu Scientific part at Taiwan, is used to demonstrate and verify the rationality and effectiveness.