Electrical models for vertical carbon nanotube capacitors

Authors:
Mark M. Budnik;Eric W. Johnson;Joshua D. Wood
Affiliations:
Valparaiso University, Valparaiso, IN, USA;Valparaiso University, Valparaiso, IN, USA;Valparaiso University, Valparaiso, IN, USA
Venue:
Proceedings of the 18th ACM Great Lakes symposium on VLSI
Year:
2008

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Abstract

We present electrical models for a carbon nanotube capacitor with high capacitance per unit area. We begin by introducing the concept of using vertically grown carbon nanotubes to develop a carbon nanotube capacitor. Three potential structures of the carbon nanotube capacitor are presented. We determine the capacitance per unit area for each structure. The carbon nanotube capacitor structures exhibit capacitances per unit area from 50fF/µm2 to 387fF/µm2 as a function of carbon nanotube diameter, inter-nanotube spacing, and nanotube length.