A capacitance solver for incremental variation-aware extraction

  • Authors:
  • Tarek A. El-Moselhy;Ibrahim M. Elfadel;Luca Daniel

  • Affiliations:
  • Research Lab in Electronics, Massachusetts Institute of Technology;Systems & Technology Group, IBM Corporation;Electronics Massachusetts Institute of Technology

  • Venue:
  • Proceedings of the 2008 IEEE/ACM International Conference on Computer-Aided Design
  • Year:
  • 2008

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Abstract

Lithographic limitations and manufacturing uncertainties are resulting in fabricated shapes on wafer that are topologically equivalent, but geometrically different from the corresponding drawn shapes. While first-order sensitivity information can measure the change in pattern parasitics when the shape variations are small, there is still a need for a high-order algorithm that can extract parasitic variations incrementally in the presence of a large number of simultaneous shape variations. This paper proposes such an algorithm based on the well-known method of floating random walk (FRW). Specifically, we formalize the notion of random path sharing between several conductors undergoing shape perturbations and use it as a basis of a fast capacitance sensitivity extraction algorithm and a fast incremental variational capacitance extraction algorithm. The efficiency of these algorithms is further improved with a novel FRW method for dealing with layered media. Our numerical examples show a 10X speed up with respect to the boundary-element method adjoint or finite-difference sensitivity extraction, and more than 560X speed up with respect to a non-incremental FRW method for a high-order variational extraction.