Comparison of dispatching rules for semiconductor manufacturing using large facility models
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
A combined dispatching criteria approach to scheduling semiconductor manufacturing systems
Computers and Industrial Engineering
Proceedings of the 33nd conference on Winter simulation
Proceedings of the 34th conference on Winter simulation: exploring new frontiers
Proceedings of the 35th conference on Winter simulation: driving innovation
Scheduling: Theory, Algorithms, and Systems
Scheduling: Theory, Algorithms, and Systems
A detailed model for a high-mix low-volume asic fab
Proceedings of the Winter Simulation Conference
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The fabrication of semiconductor devices, even in the area of customer oriented business, is one of the most complex production tasks in the world. A typical wafer production process consists of several hundred steps with numerous resources including equipment and operating staff. A reasonable assignment of each resource at each time for a certain number of wafers is vital for an efficient production process. Several requirements defined by the customers and facility management must be taken into consideration with the objective to find the best trade-off between the different needs. In this paper we describe the development of a combined dispatching policy allowing the company to set up multiple objectives and generating the best compromise between different requirements. The rule is applied at a typical ASIC facility with a low-volume high-mix characteristic.