On the Integration of Design and Test for Chips Embedding MEMS
IEEE Design & Test
Development of a MEMS Testing Methodology
Proceedings of the IEEE International Test Conference
Electrically Induced Stimuli For MEMS Self-Test
VTS '01 Proceedings of the 19th IEEE VLSI Test Symposium
Specification Test Compaction for Analog Circuits and MEMS
Proceedings of the conference on Design, Automation and Test in Europe - Volume 1
Testing of MEMS-Based Microsystems
ETS '05 Proceedings of the 10th IEEE European Symposium on Test
Alternate Electrical Tests for Extracting Mechanical Parameters of MEMS Accelerometer Sensors
VTS '06 Proceedings of the 24th IEEE VLSI Test Symposium
On-chip testing of MEMS using pseudo-random test sequences
DTIP '03 Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
SENSORCOMM '08 Proceedings of the 2008 Second International Conference on Sensor Technologies and Applications
Evaluation of a fully electrical test and calibration method for MEMS capacitive accelerometers
IMS3TW '08 Proceedings of the 2008 IEEE 14th International Mixed-Signals, Sensors, and Systems Test Workshop
ISQED '09 Proceedings of the 2009 10th International Symposium on Quality of Electronic Design
Test and calibration of MEMS convective accelerometers with a fully electrical setup
LATW '11 Proceedings of the 2011 12th Latin American Test Workshop
| Hi-index | 0.00 |
Testing and calibration of MEMS devices require physical stimulus, which results in the need for specialized test equipment and thus high test cost. It has been shown for various types of sensors that electrical stimulation can be used to facilitate lower cost calibration. In this paper, we present an electrical stimulus based test and calibration technique for overdamped spring-mass capacitive accelerometers which require the characterization of stationary and dynamic calibration coefficients. We show that these two coefficients can be electrically obtained.