Subwavelength optical lithography: challenges and impact on physical design
ISPD '99 Proceedings of the 1999 international symposium on Physical design
Subwavelength lithography and its potential impact on design and EDA
Proceedings of the 36th annual ACM/IEEE Design Automation Conference
Practical iterated fill synthesis for CMP uniformity
Proceedings of the 37th Annual Design Automation Conference
Monte-Carlo algorithms for layout density control
ASP-DAC '00 Proceedings of the 2000 Asia and South Pacific Design Automation Conference
Hierarchical dummy fill for process uniformity
Proceedings of the 2001 Asia and South Pacific Design Automation Conference
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