Moore's law and physical design of ICs
ISPD '98 Proceedings of the 1998 international symposium on Physical design
Monte-Carlo algorithms for layout density control
ASP-DAC '00 Proceedings of the 2000 Asia and South Pacific Design Automation Conference
Dummy Feature Placement for Oxide Chemical-mechanical PolishingManufacturability
Dummy Feature Placement for Oxide Chemical-mechanical PolishingManufacturability
Filling algorithms and analyses for layout density control
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Proceedings of the 2001 international symposium on Physical design
Proceedings of the 2001 international symposium on Physical design
Hierarchical dummy fill for process uniformity
Proceedings of the 2001 Asia and South Pacific Design Automation Conference
Reticle enhancement technology: implications and challenges for physical design
Proceedings of the 38th annual Design Automation Conference
Closing the smoothness and uniformity gap in area fill synthesis
Proceedings of the 2002 international symposium on Physical design
Area Fill Generation With Inherent Data Volume Reduction
DATE '03 Proceedings of the conference on Design, Automation and Test in Europe - Volume 1
ISQED '05 Proceedings of the 6th International Symposium on Quality of Electronic Design
Dummy fill density analysis with coupling constraints
Proceedings of the 2007 international symposium on Physical design
Is your layout density verification exact?: a fast exact algorithm for density calculation
Proceedings of the 2007 international symposium on Physical design
A methodology for fast and accurate yield factor estimation during global routing
Proceedings of the 2007 IEEE/ACM international conference on Computer-aided design
Synergistic physical synthesis for manufacturability and variability in 45nm designs and beyond
Proceedings of the 2008 Asia and South Pacific Design Automation Conference
Provably good and practically efficient algorithms for CMP dummy fill
Proceedings of the 46th Annual Design Automation Conference
Density gradient minimization with coupling-constrained dummy fill for CMP control
Proceedings of the 19th international symposium on Physical design
Simultaneous flare level and flare variation minimization with dummification in EUVL
Proceedings of the 49th Annual Design Automation Conference
An efficient method for gradient-aware dummy fill synthesis
Integration, the VLSI Journal
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We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fill. Comparisons with previous filling methods show the advantages of our new iterated Monte-Carlo and iterated greedy methods. We achieve near-optimal filling with respect to each of the objectives and for both density models (spatial density [3] and effective density [8]). Our new methods are more efficient in practice than linear programming [3] and more accurate than non-iterated Monte-Carlo approaches [1].