Global routing with crosstalk constraints
DAC '98 Proceedings of the 35th annual Design Automation Conference
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability
Proceedings of the 37th Annual Design Automation Conference
Practical iterated fill synthesis for CMP uniformity
Proceedings of the 37th Annual Design Automation Conference
Proceedings of the 2001 international symposium on Physical design
Hierarchical dummy fill for process uniformity
Proceedings of the 2001 Asia and South Pacific Design Automation Conference
Closing the smoothness and uniformity gap in area fill synthesis
Proceedings of the 2002 international symposium on Physical design
Performance-impact limited area fill synthesis
Proceedings of the 40th annual Design Automation Conference
SPIDER: simultaneous post-layout IR-drop and metal density enhancement with redundant fill
ICCAD '05 Proceedings of the 2005 IEEE/ACM International conference on Computer-aided design
Density gradient minimization with coupling-constrained dummy fill for CMP control
Proceedings of the 19th international symposium on Physical design
IEEE Transactions on Very Large Scale Integration (VLSI) Systems
Simultaneous flare level and flare variation minimization with dummification in EUVL
Proceedings of the 49th Annual Design Automation Conference
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In modern VLSI manufacturing processes, dummy fills are widely used to adjust local metal density in order to improve layout uniformity and yield optimization. However, the introduction of a large amount of dummy features also affects wire electrical properties. In this paper, we propose the first Coupling constrained Dummy Fill (CDF) analysis algorithm which identifies feasible locations for dummy fills such that the fill induced coupling capacitance can be bounded within the given coupling threshold of each wire segment. The algorithm also makes efforts to maximize ground dummy fills, which are more robust and predictable. The output of the algorithm can be treated as the upper bound for dummy fill insertion, and it can be easily adopted in density models to guide dummy fill insertion without disturbing the existing design.