Subwavelength optical lithography: challenges and impact on physical design

  • Authors:
  • A. B. Kahng;Y. C. Pati

  • Affiliations:
  • UCLA Department of Computer Science, Los Angela, CA;Numerical Technologies, Inc., Santa Clara, CA

  • Venue:
  • ISPD '99 Proceedings of the 1999 international symposium on Physical design
  • Year:
  • 1999

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Abstract