Materials issues in the processing, the operation and the reliability of MEMS
Microelectronic Engineering - Proceedings of the European workshop on materials for advanced metallization 2004
Fabrication of RF-MEMS switches on LTCC substrates using PECVD a-Si as sacrificial layer
Microelectronic Engineering
Device physics of capacitive MEMS
Microelectronic Engineering
Using MEMS capacitive switches in tunable RF amplifiers
EURASIP Journal on Wireless Communications and Networking
Analysis and parametric modeling of RF mems capacitive shunt switch
ICC'07 Proceedings of the 11th Conference on Proceedings of the 11th WSEAS International Conference on Circuits - Volume 11
Automated design of tunable impedance matching networks for reconfigurable wireless applications
Proceedings of the 45th annual Design Automation Conference
Investigation of RF sputtered PSG films for MEMS and semiconductor devices
Microelectronic Engineering
Microelectronic Engineering
Analysis and parametric modeling of RF MEMS capacitive shunt switch
MINO'07 Proceedings of the 6th conference on Microelectronics, nanoelectronics, optoelectronics
An ohmic RF MEMS switch for reconfigurable microstrip array antennas built on PCB
CSECS'08 Proceedings of the 7th conference on Circuits, systems, electronics, control and signal processing
Validation of compact models of microcantilever actuators for RF-MEMS design
Analog Integrated Circuits and Signal Processing
On the design of an Ohmic RF MEMS switch for reconfigurable microstrip antenna applications
WSEAS TRANSACTIONS on COMMUNICATIONS
Wafer-level thin-film encapsulation for MEMS
Microelectronic Engineering
Micro-electro-mechanical (MEM) diode switch
Microelectronic Engineering
System-on-Chip Test Architectures: Nanometer Design for Testability
System-on-Chip Test Architectures: Nanometer Design for Testability
Band 3+ RF MEMS micro switch and its application to a high power tunable filter
RWS'09 Proceedings of the 4th international conference on Radio and wireless symposium
Nanoelectromechanical (NEM) relays integrated with CMOS SRAM for improved stability and low leakage
Proceedings of the 2009 International Conference on Computer-Aided Design
Design of switched multiband filters for IEEE 802.11a/b/g WLANs
WSEAS TRANSACTIONS on COMMUNICATIONS
Polyimide sacrificial layer for SOI SG-MOSFET pressure sensor
Microelectronic Engineering
SiGe based grating light valves: A leap towards monolithic integration of MOEMS
Microelectronic Engineering
Materials selection procedure for RF-MEMS
Microelectronic Engineering
Hermetically-sealed evanescent-mode resonators utilizing packaging as cavities
RWS'10 Proceedings of the 2010 IEEE conference on Radio and wireless symposium
Development of a dual-SPDT RF-MEMS switch for Ku-band
RWS'10 Proceedings of the 2010 IEEE conference on Radio and wireless symposium
A MEMS reconfigurable quad-band class-E power amplifier for GSM standard
Proceedings of the Conference on Design, Automation and Test in Europe
Adaptive impedance-matching techniques for controlling L networks
IEEE Transactions on Circuits and Systems Part I: Regular Papers
Large-Scale 3D Phase Field Dislocation Dynamics Simulations On High-Performance Architectures
International Journal of High Performance Computing Applications
A 45nm CMOS miniature phase shifter with constant amplitude response
Microelectronics Journal
On the investigation of a reliable actuation control method for ohmic RF MEMS switches
Microelectronics Journal
Investigation of silicon nitride charging
Microelectronic Engineering
An easy to control all-metal in-line-series ohmic RF MEMS switch
Analog Integrated Circuits and Signal Processing
Modulation instability in RF MEMS devices
Analog Integrated Circuits and Signal Processing
The nonlinear dynamic response of microbeam of MEMS capacitive switch under mechanical shock
Analog Integrated Circuits and Signal Processing
A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
Microelectronic Engineering
RF-MEMS switch design optimization for long-term reliability
Analog Integrated Circuits and Signal Processing
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From the Publisher:Practical and theoretical coverage of RF MEMS for circuits and devicesNew RF and microwave frequency MEMS (microeletromechanical systems) have potentially enormous and widespread applications in the telecommunications industry. Components based on this technologysuch as switches, varactors, and phase shiftersexhibit virtually no power consumption or loss, making them ideally suited for use in modern telecommunications and wireless devices. This book sets out the basics of RF MEMS and describes how to design practical devices and circuits. As well as covering fundamentals, Gabriel Rebeiz offers expert tips for designers and presents a range of real-world applications. Throughout, the author utilizes actual engineering examples to illustrate basic principles in theory and practice. Detailed discussion of cutting-edge fabrication and packaging techniques is provided. Suitable as a tutorial for electrical and computer engineering students, or as an up-to-date reference for practicing circuit designers, RF MEMS provides the most comprehensive available survey of this new and important technology. Author Biography: Gabriel M. Rebeiz received his PhD from the California Institute of Technology, and is Professor of Electrical and Computer Engineering at the University of Michigan, Ann Arbor. In 1991 he was the recipient of the National Science Foundation Presidential Young Investigator Award, and in 2000 was the corecipient of the IEEE Microwave Prize. A Fellow of the IEEE and a consultant to Rockwell, Samsung, Intel, Standard MEMS, and Agilent, he has published extensively in the field of microwave technology and in the area of RF MEMS.