An Efficiently Computable Metric for Comparing Polygonal Shapes
IEEE Transactions on Pattern Analysis and Machine Intelligence
Clustering Large Datasets in Arbitrary Metric Spaces
ICDE '99 Proceedings of the 15th International Conference on Data Engineering
Optical proximity correction (OPC): friendly maze routing
Proceedings of the 41st annual Design Automation Conference
RADAR: RET-aware detailed routing using fast lithography simulations
Proceedings of the 42nd annual Design Automation Conference
High performance lithographic hotspot detection using hierarchically refined machine learning
Proceedings of the 16th Asia and South Pacific Design Automation Conference
Dealing with IC manufacturability in extreme scaling
Proceedings of the International Conference on Computer-Aided Design
Proceedings of the 50th Annual Design Automation Conference
Hi-index | 0.00 |
A distance metric of patterns is crucial to hotspot cluster analysis and classification. In this paper, we propose an improved tangent space based metric for pattern matching based hotspot cluster analysis and classification. The proposed distance metric is an important extension of the well-developed tangent space method in computer vision. It can handle patterns containing multiple polygons, while the traditional tangent space method can only deal with patterns with a single polygon. It inherits most of the advantages of the traditional tangent space method, e.g., it is easy to compute and is tolerant with small variations or shifts of the shapes. Compared with the existing distance metric based on XOR of hotspot patterns, the improved tangent space based distance metric can achieve up to 37.5% accuracy improvement with at most 4.3x computational cost in the context of cluster analysis. The improved tangent space based distance metric is a more reliable and accurate metric for hotspot cluster analysis and classification. It is more suitable for industry applications.