RADAR: RET-aware detailed routing using fast lithography simulations
Proceedings of the 42nd annual Design Automation Conference
Working Set Selection Using Second Order Information for Training Support Vector Machines
The Journal of Machine Learning Research
Efficient process-hotspot detection using range pattern matching
Proceedings of the 2006 IEEE/ACM international conference on Computer-aided design
Accurate detection for process-hotspots with vias and incomplete specification
Proceedings of the 2007 IEEE/ACM international conference on Computer-aided design
ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction
Proceedings of the 45th annual Design Automation Conference
Predictive formulae for OPC with applications to lithography-friendly routing
Proceedings of the 45th annual Design Automation Conference
Predicting variability in nanoscale lithography processes
Proceedings of the 46th Annual Design Automation Conference
Proceedings of the 48th Design Automation Conference
Accurate process-hotspot detection using critical design rule extraction
Proceedings of the 49th Annual Design Automation Conference
Improved tangent space based distance metric for accurate lithographic hotspot classification
Proceedings of the 49th Annual Design Automation Conference
Dealing with IC manufacturability in extreme scaling
Proceedings of the International Conference on Computer-Aided Design
Proceedings of the 50th Annual Design Automation Conference
A novel fuzzy matching model for lithography hotspot detection
Proceedings of the 50th Annual Design Automation Conference
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Under real and continuously improving manufacturing conditions, lithography hotspot detection faces several key challenges. First, real hotspots become less but harder to fix at post-layout stages; second, false alarm rate must be kept low to avoid excessive and expensive post-processing hotspot removal; third, full chip physical verification and optimization require fast turn-around time. To address these issues, we propose a high performance lithographic hotspot detection flow with ultra-fast speed and high fidelity. It consists of a novel set of hotspot signature definitions and a hierarchically refined detection flow with powerful machine learning kernels, ANN (artificial neural network) and SVM (support vector machine). We have implemented our algorithm with industry-strength engine under real manufacturing conditions in 45nm process, and showed that it significantly out-performs previous state-of-the-art algorithms in hotspot detection false alarm rate (2.4X to 2300X reduction) and simulation run-time (5X to 237X reduction), meanwhile archiving similar or slightly better hotspot detection accuracies. Such high performance lithographic hotspot detection under real manufacturing conditions is especially suitable for guiding lithography friendly physical design.