On the k-coloring of intervals
Discrete Applied Mathematics
Fast Approximation Algorithms on Maxcut, k-Coloring, and k-Color Ordering for VLSI Applications
IEEE Transactions on Computers
Track assignment: a desirable intermediate step between global routing and detailed routing
Proceedings of the 2002 IEEE/ACM international conference on Computer-aided design
A novel wire-density-driven full-chip routing system for CMP variation control
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Proceedings of the International Conference on Computer-Aided Design
DUNE-a multilayer gridless routing system
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Crosstalk- and performance-driven multilevel full-chip routing
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Antenna avoidance in layer assignment
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Full-Chip Routing Considering Double-Via Insertion
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
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Multiple e-beam lithography (MEBL) is one of the most promising next generation lithography (NGL) technologies for high volume manufacturing, which improves the most critical issue of conventional single e-beam lithography, throughput, by simultaneously using thousands or millions of e-beams. For parallel writing in MEBL, a layout is split into stripes and patterns are cut by stripe boundaries, which are defined as stitching lines. Critical patterns cut by stitching lines could suffer from severe pattern distortion or even yield loss. Therefore, considering the positions of stitching lines and avoiding stitching line-induced bad patterns are required during layout design. In this paper, we propose the first work of stitch-aware routing framework for MEBL based on a two-pass bottom-up multilevel router. We first identify three types of stitching line-induced bad patterns which should not exist in an MEBL-friendly routing solution. Then, stitch-aware routing algorithms are respectively developed for global routing, layer/track assignment and detailed routing. Experimental results show that our stitch-aware routing framework can effectively reduce stitching line-induced bad patterns and thus may not only improve the manufacturability but also facilitate the development of MEBL.