A highly testable and diagnosable fabrication process test chip

  • Authors:
  • Dilip K. Bhavsar;Ugonna Echeruo;David R. Akeson;William J. Bowhill

  • Affiliations:
  • -;-;-;-

  • Venue:
  • ITC '98 Proceedings of the 1998 IEEE International Test Conference
  • Year:
  • 1998

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Abstract

We present the concept and prototype of theLogic Test Vehicle (LTV), a novel tool forramp-up, qualification and monitoring ofsemiconductor fabrication processes. The LTVovercomes some of the known shortcomings ofSRAM test vehicle used today for thesepurposes. It employs test circuitry which ismore complex and more representative of thecomplexities found on real products yet retainstestability and diagnosability, the two mostimportant attributes required of test vehicles.