Ultralow-power SRAM technology

  • Authors:
  • R. W. Mann;W. Abadeer;M. J. Breitwisch;O. Bula;J. S. Brown;B. C. Colwill;P. E. Cottrell;W. G. Crocco;S. Furkay;M. J. Hauser;T. B. Hook;D. Hoyniak;J. M. Johnson;C. H. Lam;R. D. Mih;J. Rivard;A. Moriwaki;E. Phipps;C. S. Putnam;B. A. Rainey;J. Toomey;M. I. Younus

  • Affiliations:
  • IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452;IBM Microelectronics Division, Burlington facility, 1000 River Road, Essex Junction, Vermont 05452

  • Venue:
  • IBM Journal of Research and Development
  • Year:
  • 2003

Quantified Score

Hi-index 0.00

Visualization

Abstract

An ultralow-standby-power technology has been developed in both 0.18-脗µm and 0.13-脗µm lithography nodes for embedded and standalone SRAM applications. The ultralow-leakage six-transistor (6T) SRAM cell sizes are 4.81 脗µm2 and 2.34 脗µm2, corresponding respectively to the 0.18-脗µm and 0.13-脗µm design dimensions. The measured array standby leakage is equal to an average cell leakage current of less than 50 fA per cell at 1.5 V, 25脗°C and is less than 400 fA per cell at 1.5 V, 85脗°C. Dual gate oxides of 2.9 nm and 5.2 nm provide optimized cell leakage, I/O compatibility, and performance. Analyses of the critical parasitic leakage components and paths within the 6T SRAM cell are reviewed in this paper. In addition to the well-known gate-oxide leakage limitation for ULP technologies, three additional limits facing future scaled ULP technologies are discussed.