Impact of lens aberrations on optical lithography
IBM Journal of Research and Development - Special issue: optical lithography I
Implementation and extensibility of an analytic placer
Proceedings of the 2004 international symposium on Physical design
APlace: a general analytic placement framework
Proceedings of the 2005 international symposium on Physical design
Proceedings of the 42nd annual Design Automation Conference
Supply Voltage Degradation Aware Analytical Placement
ICCD '05 Proceedings of the 2005 International Conference on Computer Design
An analytic placer for mixed-size placement and timing-driven placement
Proceedings of the 2004 IEEE/ACM International conference on Computer-aided design
Architecture and details of a high quality, large-scale analytical placer
ICCAD '05 Proceedings of the 2005 IEEE/ACM International conference on Computer-aided design
Implementation and extensibility of an analytic placer
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
A faster implementation of APlace
Proceedings of the 2006 international symposium on Physical design
Synergistic physical synthesis for manufacturability and variability in 45nm designs and beyond
Proceedings of the 2008 Asia and South Pacific Design Automation Conference
Proceedings of the conference on Design, automation and test in Europe
Lens aberration aware placement for timing yield
ACM Transactions on Design Automation of Electronic Systems (TODAES)
Adapting Application Mapping to Systematic Within-Die Process Variations on Chip Multiprocessors
HiPEAC '09 Proceedings of the 4th International Conference on High Performance Embedded Architectures and Compilers
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Process variations due to lens aberrations are to a large extent systematic, and can be modeled for purposes of analyses and optimizations in the design phase. Traditionally, variations induced by lens aberrations have been considered random due to their small extent. However, as process margins reduce, and as improvements in reticle enhancement techniques control variations due to other sources with increased efficacy, lens aberration-induced variations gain importance. For example, our experiments indicate that lens aberration can result in up to 8% variation in cell delay. In this paper, we propose an aberration-aware timing-driven analytical placement approach that accounts for aberration-induced variations during placement. Our approach minimizes the design's cycle time and prevents hold-time violations under systematic aberration-induced variations. On average, the proposed placement technique reduces cycle time by ~ 5% at the cost of ~ 2% increase in wirelength.