Wire segmenting for improved buffer insertion
DAC '97 Proceedings of the 34th annual Design Automation Conference
Monte-Carlo algorithms for layout density control
ASP-DAC '00 Proceedings of the 2000 Asia and South Pacific Design Automation Conference
Performance-impact limited area fill synthesis
Proceedings of the 40th annual Design Automation Conference
Coupling aware timing optimization and antenna avoidance in layer assignment
Proceedings of the 2005 international symposium on Physical design
Proceedings of the 2005 international symposium on Physical design
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
A fast algorithm for optimal buffer insertion
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Full-chip routing system for reducing Cu CMP & ECP variation
Proceedings of the 21st annual symposium on Integrated circuits and system design
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This paper studies the impacts of dummy fill for chemical mechanical polishing (CMP)-induced capacitance variation on buffer insertion during routing. Compared with existing methods, our algorithm is more feasible by performing buffer insertion not in post-process but during routing. Our contributions are threefold. First, we introduce a fast dummy fill estimation algorithm based on [4], which is better than traditional linear programming (LP) algorithm and suitable for early estimation. Second, based on some reasonable assumptions, we present an optimum virtual dummy fill method to estimate dummy position and the effects on the interconnect capacitance. Third, further analysis shows that the influences on the intermediate layer are more than that on the global layer, and as the required metal layer density increases the influences become more serious. Experiments gave the similar results and verified the necessity of early dummy fill estimation. Our dummy fill aware buffer insertion during early routing is promising and necessary.