Design and performance evaluation of new massively parallel VLSI mask verification algorithms in JIGSAW

Authors:
Erik C. Carlson;Rob A. Rutenbar
Affiliations:
Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA;Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA
Venue:
DAC '90 Proceedings of the 27th ACM/IEEE Design Automation Conference
Year:
1991

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Abstract

This paper describes JIGSAW, the massively parallel mask checking system that has evolved from our earlier feasibility study on large-scale, fine-grain parallelism in simple mask checking tasks [1]. Unlike previous systems, JIGSAW parallelizes all phases of the checking process. We describe new techniques to handle all-angle geometry, the first massively parallel mask flattening and multi-layer netlist extraction algorithms, and measurements made comparing JIGSAW, running on a Connection Machine, against industry-standard tools. End-to-end speedups, (i.e., from CIF to errors) range from 19 to 58 over DRACULA, with larger masks producing larger speedups.