A 45.6μ2 13.4μw 7.1v/v resolution sub-threshold based digital process-sensing circuit in 45nm CMOS

  • Authors:
  • Basab Datta;Wayne Burleson

  • Affiliations:
  • University of Massachusetts-Amherst, Amherst, MA, USA;University of Massachusetts-Amherst, Amherst, MA, USA

  • Venue:
  • Proceedings of the 21st edition of the great lakes symposium on Great lakes symposium on VLSI
  • Year:
  • 2011

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Abstract

Process optimization and yield enhancement techniques rely on physical sensors to provide them with feedback to perform accurate process-characterization across the die. The increased susceptibility of circuit performance characteristics to parameter variations in deep sub-micron technologies motivates the need for low-overhead (area/power) and high-sensitivity process monitoring circuits which can be used by compensation schemes to tune the process and meet frequency targets or power-budgets. To this end, we have proposed and implemented in 45nm CMOS-SOI, a novel, digital, on-chip process sensing circuit with a high sensitivity of 7.1V per volt variation in NMOS Vth, low power dissipation of 13.4¼W and a compact layout occupying 45.6¼2. The design is robust towards temperature variations and supply induced noise incurring an accuracy loss of 5mV (worst-case) and 4mV (1-Ã) respectively of the NMOS threshold-voltage.