CMOS scaling into the 21st century: 0.1 &mgr;m and beyond

  • Authors:
  • Y. Taur;Y.-J. Mii;D. J. Frank;H.-S. Wong;D. A. Buchanan;S. J. Wind;S. A. Rishton;G. A. Sai-Halasz;E. J. Nowak

  • Affiliations:
  • -;-;-;-;-;-;-;-;-

  • Venue:
  • IBM Journal of Research and Development - Special issue: IBM CMOS technology
  • Year:
  • 1995

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Abstract