Validating manufacturing processes using timed sequential machines: application to a semiconductor manufacturing process (WIP)

Authors:
Pamela Viale;Norbert Giambiasi;Claudia Frydman;Jacques Pinaton
Affiliations:
Laboratoire des Sciences de l'Information et des Systemes (LSIS), Marseille, France and STMicroelectronics, Rousset, France;Laboratoire des Sciences de l'Information et des Systemes (LSIS), Marseille, France and CIFASIS, Centro Internacional Franco Argentino de Ciencias de la información y de Sistemas, Rosario, Ar ...;Laboratoire des Sciences de l'Information et des Systemes (LSIS), Marseille, France and CIFASIS, Centro Internacional Franco Argentino de Ciencias de la información y de Sistemas, Rosario, Ar ...;STMicroelectronics, Rousset, France
Venue:
Proceedings of the 2012 Symposium on Theory of Modeling and Simulation - DEVS Integrative M&S Symposium
Year:
2012

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Abstract

Process diagnostics is a difficult task that concerns most enterprises. Our methodology proposes the construction of process models from different sources of information. It uses their comparison to help experts answer some of the questions she/he is confronted when analyzing processes. The application to STMicroelectronics is presented in this article. This methodology can help this enterprise to validate their manufacturing processes.