Impact of On-Chip Inductance When Transitioning from Al to Cu Based Technology

  • Authors:
  • Affiliations:
  • Venue:
  • ISQED '01 Proceedings of the 2nd International Symposium on Quality Electronic Design
  • Year:
  • 2001

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Abstract

How does on-chip inductance impact timing closure when transitioning from Al to Cu based technology? This paper presents some experimental results based on a Al-based 0.18 µm CMOS process and a Cu-based 0.13 µm CMOS process. The results show that the impact of on-chip inductance is slightly more on the Cu-based 0.3 µm process than on the Al-based 0.18 µm process. Furthermore, the results demonstrate that on-chip inductance plays an insignificant role if we assume a perfect power supply network around the interconnect routes.