A green function-based parasitic extraction method for inhomogeneous substrate layers

  • Authors:
  • Chenggang Xu;Ranjit Gharpurey;Terri S. Fiez;Kartikeya Mayaram

  • Affiliations:
  • Oregon State University, Corvallis, OR;University of Michigan, Ann Arbor, MI;Oregon State University, Corvallis, OR;Oregon State University, Corvallis, OR

  • Venue:
  • Proceedings of the 42nd annual Design Automation Conference
  • Year:
  • 2005

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Abstract

This paper presents a new Green function-based approach for substrate parasitic extraction in substrates with inhomogeneous layers. This new formulation allows analysis of noise coupling with sinkers, trenches and wells, - a limitation in prior Green function-based extractors. Numerical examples for sinkers and trenches are provided and compared with the results from threedimensional semiconductor device simulations. It is shown that the proposed method is accurate and computationally efficient.