Via Distribution Model for Yield Estimation

  • Authors:
  • Takumi Uezono;Kenichi Okada;Kazuya Masu

  • Affiliations:
  • Tokyo Institute of Technology;Tokyo Institute of Technology;Tokyo Institute of Technology

  • Venue:
  • ISQED '06 Proceedings of the 7th International Symposium on Quality Electronic Design
  • Year:
  • 2006

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Abstract

In this paper, we propose a via distribution model for yield estimation. The proposed model expresses a relationship between the number of vias and wire length. We can also estimate the total number of vias in a circuit, which is derived from the via distribution and the wire-length distribution. The via distribution is modeled as a function of track utilization, and the wire-length distribution can be derived from a gate-level netlist and layout area. We extract model parameters from the commercial chips designed for 0.18-ìm and 0.13-ìm CMOS processes, and demonstrate yield degradation caused by vias.