Crosstalk Noise Verification in Digital Designs with Interconnect Process Variations
VLSID '01 Proceedings of the The 14th International Conference on VLSI Design (VLSID '01)
Impact of Process Variations on Multi-Level Signaling for On-Chip Interconnects
VLSID '05 Proceedings of the 18th International Conference on VLSI Design held jointly with 4th International Conference on Embedded Systems Design
Stochastic analysis of interconnect performance in the presence of process variations
Proceedings of the 2004 IEEE/ACM International conference on Computer-aided design
Generation of design guarantees for interconnect matching
Proceedings of the 2006 international workshop on System-level interconnect prediction
Layout decomposition for double patterning lithography
Proceedings of the 2008 IEEE/ACM International Conference on Computer-Aided Design
Overlay aware interconnect and timing variation modeling for double patterning technology
Proceedings of the 2008 IEEE/ACM International Conference on Computer-Aided Design
Proceedings of the 2009 International Conference on Computer-Aided Design
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
A statistical yield optimization framework for interconnect in double patterning lithography
Microelectronics Journal
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Double patterning lithography seems to be a prominent choice for 32nm and 22nm technologies. Double patterning lithography techniques require additional masks for a single interconnect layer. Consequently, mask shift-induced overlay errors introduce additional variability into interconnect coupling capacitances. An important open question is whether overlay-induced performance impacts are more significant than performance variations caused by variability in interconnects. We provide TCAD as well as chip-level analyses to determine whether overlay error should receive more attention than interconnect variations during interconnect manufacturing. We develop conclusions to help determine which component should be given more importance in specific double patterning process variants.