SOI technology for the GHz era

  • Authors:
  • G. G. Shahidi

  • Affiliations:
  • IBM Microelectronics Division, Hopewell Junction, New York

  • Venue:
  • IBM Journal of Research and Development
  • Year:
  • 2002

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Abstract

This paper focuses on approaches to continuing CMOS scaling by introducing new device structures and new materials. Starting from an analysis of the sources of improvements in device performance, we present technology options for achieving these performance ...