PathFinder: a negotiation-based performance-driven router for FPGAs
FPGA '95 Proceedings of the 1995 ACM third international symposium on Field-programmable gate arrays
Layout decomposition for double patterning lithography
Proceedings of the 2008 IEEE/ACM International Conference on Computer-Aided Design
Self-aligned double patterning decomposition for overlay minimization and hot spot detection
Proceedings of the 48th Design Automation Conference
A polynomial time exact algorithm for self-aligned double patterning layout decomposition
Proceedings of the 2012 ACM international symposium on International Symposium on Physical Design
Flexible self-aligned double patterning aware detailed routing with prescribed layout planning
Proceedings of the 2012 ACM international symposium on International Symposium on Physical Design
Self-aligned double patterning aware pin access and standard cell layout co-optimization
Proceedings of the 2014 on International symposium on physical design
Proceedings of the International Conference on Computer-Aided Design
Constrained pattern assignment for standard cell based triple patterning lithography
Proceedings of the International Conference on Computer-Aided Design
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Self-aligned double patterning (SADP) lithography is a leading technology for 10nm node Metal layer fabrication. In order to achieve successful decomposition, SADP-compliant design becomes a necessity. Spacer-Is-Dielectric (SID) is the most popular flavor of SADP with higher flexibility in design. This paper makes a careful study on the challenges for SID-compliant detailed routing and proposes a graph model to capture the decomposition violations and SID intrinsic residue issues. Then a negotiated congestion based scheme is adopted to solve the overall routing problem. The proposed SID-compliant detailed routing algorithm simultaneously assigns colors to the routed wires, which provides valuable information guiding SID decomposition. In addition, if one pin has multiple candidate locations, the optimal one will be automatically determined during detailed routing. The decomposability of the conflict-free routing layers produced by our detailed router is verified by a commercial SADP decomposition tool.