AFFCCA: a tool for critical area analysis with circular defects and lithography deformed layout

Authors:
I. Bubel;W. Maly;T. Waas;P. K. Nag;H. Hartmann;D. Schmitt-Landsiedel;S. Griep
Affiliations:
-;-;-;-;-;-;-
Venue:
DFT '95 Proceedings of the IEEE International Workshop on Defect and Fault Tolerance in VLSI Systems
Year:
1995

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Abstract

This paper describes the AFFCCA (Accurate, Fast, Flexible Computation of Critical Area) tool. The algorithms implemented in AFFCCA can handle arbitrary geometry, defects causing shorts of arbitrary shapes, and a spectrum of process induced layout deformations. The presented results indicate that the unique features of AFFCCA allow for significant improvements in the accuracy of critical area computations.