A stochastic integral equation method for modeling the rough surface effect on interconnect capacitance

Authors:
Zhenhai Zhu;J. White;A. Demir
Affiliations:
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA;Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA;Dept. of ECE, Arizona Univ., Tucson, AZ, USA
Venue:
Proceedings of the 2004 IEEE/ACM International conference on Computer-aided design
Year:
2004

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Abstract

In This work we describe a stochastic integral equation method for computing the mean value and the variance of capacitance of interconnects with random surface roughness. An ensemble average Green's function is combined with a matrix Neumann expansion to compute nominal capacitance and its variance. This method avoids the time-consuming Monte Carlo simulations and the discretization of rough surfaces. Numerical experiments show that the results of the new method agree very well with Monte Carlo simulation results.