Three dimensional metallization for vertically integrated circuits

  • Authors:
  • P. Ramm;D. Bollmann;R. Braun;R. Buchner;U. Cao-Minh;M. Engelhardt;G. Errmann;T. Graßl;H. Hü;G. Kawala;M. Kleiner;A. Klumpp;S. Kühn;C. Landesberger;H. Lezec;W. Muth;W. Pamler;R. Popp;E. Renner;G. Ruhl;K. Hieberßbner

  • Affiliations:
  • -;-;-;-;-;-;-;-;-;-;-;-;-;-;-;-;-;-;-;-;-

  • Venue:
  • Microelectronic Engineering
  • Year:
  • 1997

Quantified Score

Hi-index 2.88

Visualization

Abstract