Maintaining the benefits of CMOS scaling when scaling bogs down

Authors:
E. J. Nowak
Affiliations:
IBM Microelectronics Division, Essex Junction, Vermont
Venue:
IBM Journal of Research and Development
Year:
2002

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Abstract

This paper focuses on approaches to continuing CMOS scaling by introducing new device structures and new materials. Starting from an analysis of the sources of improvements in device performance, we present technology options for achieving these performance ...