Semiconductor manufacturing process monitoring using built-in self-test for embedded memories

Authors:
Ivo Schanstra;Dharmajaya Lukita;A. J. van de Goor;Kees Veelenturf;Paul J. van Wijnen
Affiliations:
-;-;-;-;-
Venue:
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Year:
1998

Citing 6
Cited 10

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Abstract

Memories are often used as a semiconductormanufacturing process monitoring vehicle. This paperdescribes a new memory Built-In Self-Test (BIST) methodthat is used to monitor the semiconductor manufacturingprocess. For this purpose, this BIST method has the abilitynot only to generate a pass/fail verdict for the testedmemory, but also to report additional information to beable to narrow down the type and the location of thefailure mode that is causing the tested memory to fail.Also, it offers test algorithm flexibility. The described BISTmethod has successfully been implemented in a dedicatedprocess monitoring chip that is now being used in largequantities.