A layout checking system for large scale integrated circuits

  • Authors:
  • Kenii Yoshida;Takashi Mitsuhashi;Yasuo Nakada;Toshiaki Chiba;Kiyoshi Ogita;Shinji Nakatsuka

  • Affiliations:
  • -;-;-;-;-;-

  • Venue:
  • DAC '77 Proceedings of the 14th Design Automation Conference
  • Year:
  • 1977

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Abstract

This paper describes a new design rule checking system for LSI mask patterns. Major features of the system are a relatively small computing time needed, even for very large circuits (e.g. 10,000 elements), wide applications to a variety of fabrication processes, due to its functional flexibility, and minimized spurious errors.