On-Chip TSV Testing for 3D IC before Bonding Using Sense Amplification

  • Authors:
  • Po-Yuan Chen;Cheng-Wen Wu;Ding-Ming Kwai

  • Affiliations:
  • -;-;-

  • Venue:
  • ATS '09 Proceedings of the 2009 Asian Test Symposium
  • Year:
  • 2009

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Abstract

We present a novel testing scheme for TSVs in a 3D IC by performing on-chip TSV monitoring before bonding, using a sense amplification technique that is commonly seen on a DRAM. By virtue of the inherent capacitive characteristics, we can detect the faulty TSVs with little area overhead for the circuit under test.